Electrical properties of nanocomposite thin films deposited in ECR plasma

The electrical properties of plasma deposited nanocomposite thin films based on graphite-like nanoparticles embedded in a hydrogenated amorphous carbon matrix were studied. In contrast with classical dielectric materials, dielectric losses present a relaxation peak dependent on white light intensity. The latter is attributed to nanoparticles that are responsible for this photo-excited mechanism.